Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XVII

Hennig, Guido [ed.]

English Conference proceedings (Book) Scientific

Published: International Society for Optics and Photonics (SPIE), Bellingham (WA), United States of America 2012

Conference: Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII 2012-01-23 [San Francisco (CA), United States of America]

Series: Proceedings of SPIE 0277-786X 1996-756X, 8243

Identifiers

MTMT: 30080288
ISBN: 9780819488862

Chapters

Lorenz P et al. Laser-induced front side etching of fused silica with short and ultrashort laser pulses. (2012) In: Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XVII

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2025-04-25 07:27