TY  - CHAP
AU  - Bein, Márton
AU  - Mizsei, János
ED  - Bernard, Courtois
ED  - Marta, Rencz
TI  - Contracting Current Paths in Vanadium Dioxide Thin Films
T2  - Proceedings of the 17th International Workshop on THERMal INvestigation of ICs and Systems (THERMINIC'11)
PB  - EDA Publishing Association
CY  - Grenoble
SN  - 9781457707780
PY  - 2011
SP  - 66
EP  - 69
PG  - 4
UR  - https://m2.mtmt.hu/api/publication/2668775
ID  - 2668775
AB  - Vanadium dioxide (VO2) has been extensively investigated due to 
its thermal-induced metal-insulator transition (MIT) at about 67 
oC; which can be lowered by doping. During the transition from 
semiconductor to metallic phase electrical conductivity can 
increase by up to 3-4 orders of magnitude, while optical 
reflectance can drop by almost 50%. Possible applications 
include thermally controlled electrical and optical switches. As 
the thin film is conductive optical changes can be induced 
electrically by Joule-heating.
In this paper we present electro-optical measurements carried 
out on 100 nm thick VO2 thin films deposited on sapphire 
substrates. Phase transitions were electrically induced in 
contacted films and observed using an optical microscope. Strong 
spatial inhomogeneity has been detected: a few micron wide dark 
path connected the two contacts. The visible channel is a 
metallic area within the semiconducting film as the domain 
undergoes a MIT because of the Joule-heat of the flowing 
current.
The optically observable fine structure found suggests that VO2 
thin films could be used to visualize isotherms with a 
resolution of a few microns, similar to that of liquid crystals. 
Possible benefits include the simple and reliable use of the 
once deposited solid phase precision films and a higher 
resolution compared to liquid crystal thermography.
LA  - English
DB  - MTMT
ER  - 

TY  - JOUR
AU  - Csendes, A
AU  - Székely, Vladimir
AU  - Kerecsen Istvánné Rencz, Márta
TI  - Thermal mapping with liquid crystal method
JF  - MICROELECTRONIC ENGINEERING
J2  - MICROELECTRON ENG
VL  - 31
PY  - 1996
IS  - 1-4
SP  - 281
EP  - 290
PG  - 10
SN  - 0167-9317
DO  - 10.1016/0167-9317(95)00350-9
UR  - https://m2.mtmt.hu/api/publication/2606972
ID  - 2606972
AB  - Good resolution thermal mapping can be achieved by using liquid crystals. The article presents a new, high resolution automated measuring equipment, which executes the measurement and the evaluation process under computer control. The equipment was developed especially for micro-thermography of integrated circuits. The paper presents the practical aspects of the liquid crystal measuring method. Resolution and accuracy features of the method are also discussed.
LA  - English
DB  - MTMT
ER  -