
Megjegyzés: The research reported in this paper was supported by the Budapest University of Technology and Economics and Optimal Optik Ltd. The research was also supported by the Hungarian National Research, Development and Innovation (NRDI) Office under the Cooperative Doctoral Programme for Doctoral Scholarship (KDP-2021), and by the János Bólyai Research Grant (BO/0042/23/6) of the Hungarian Academy of Sciences.
Megjegyzés: This work was partially supported by Nanoplasmonic Laser Fusion Research Laboratory (NAPLIFE) project financed by the National Research and Innovation Office (2022-2.1.1-NL-2022-00002), Hungary. Project no. TKP2021-EGA-02 has been implemented with the support provided by the Ministry of Culture and Innovation of Hungary from the National Research, Development and Innovation Fund, financed under the TKP2021-EGA funding scheme. The research was also supported by the National Research and Innovation Office under project number: 2020-1.2.3-EUREKA-2022-00030. The project is also supported by the Doctoral Excellence Fellowship Programme (DCEP) is funded by the National Research Development and Innovation Fund of the Ministry of Culture and Innovation and the Budapest University of Technology and Economics, under a grant agreement with the National Research, Development and Innovation Office. This work is also supported by the ÚNKP-23-3-I-BME-269 New National Excellence Program of the Ministry for Culture and Innovation from the source of National Research, Development and Innovation Fund. The research was also supported by the Hungarian National Research, Development and Innovation (NRDI) Office under the Cooperative Doctoral Programme for Doctoral Scholarship (KDP-2021). Tomáš Lednický acknowledges CzechNanoLab Research Infrastructure supported by MEYS CR (LM2023051) and funding from the European Union‘s Horizon Europe research and innovation programme under grant agreement No 101109232. This work is funded by the Austrian Federal Ministry of Climate Action, Environment, Energy, Mobility, Innovation and Technology, the Austrian Federal Ministry of Digital and Economic Affairs, and implemented by Austria Wirtschaftsservice (AWS) and the Austrian Research Promotion Agency (FFG) in the frame of the Important Project of Common European Interest on Microelectronics (IPCEI on ME). The IPCEI on Microelectronics is also funded by Public Authorities from Germany, France, Italy, and U.K.
Megjegyzés: Volume 5: Issue 2