@article{MTMT:34445377, title = {Aluminum tantalum oxide thin films deposited at low temperature by pulsed direct current reactive magnetron sputtering for dielectric applications}, url = {https://m2.mtmt.hu/api/publication/34445377}, author = {Drevet, Richard and Souček, Pavel and Mareš, Pavel and Ondračka, Pavel and Dubau, Martin and Kolonits, Tamás and Czigány, Zsolt and Balázsi, Katalin and Vašina, Petr}, doi = {10.1016/j.vacuum.2023.112881}, journal-iso = {VACUUM}, journal = {VACUUM}, volume = {221}, unique-id = {34445377}, issn = {0042-207X}, abstract = {This research aims at studying aluminum tantalum oxide thin films (AlxTayOz) deposited at low temperature for dielectric applications. These ternary oxide layers are synthesized at 180 °C by physical vapor deposition (PVD), specifically the mid-frequency pulsed direct current reactive magnetron sputtering. The deposition process uses targets made of a mixture of aluminum and tantalum in various proportions. Four target compositions are studied containing 95 at.%, 90 at.%, 80 at.%, and 70 at.% of aluminum, corresponding to 5 at.%, 10 at.%, 20 at.%, and 30 at.% of tantalum, respectively. The ternary oxide thin films of AlxTayOz are compared to aluminum oxide (AlxOz) and tantalum oxide (TayOz) layers produced in the same experimental conditions. The AlxTayOz thin films are dense, uniform, and amorphous regardless of the experimental conditions used in this study. Their chemical composition changes as a function of the target composition. The oxygen flow used during deposition also affects the chemical composition of the oxide layers and the deposition rate. The oxide thin films with tantalum are deposited at higher deposition rates and contain more oxygen. Tantalum also promotes the amorphization of the oxide layers. The highest dielectric strength is measured for the thin film containing a low amount of tantalum combined with a high amount of oxygen.}, keywords = {ALUMINUM; Tantalum; Reactive magnetron sputtering; dielectric strength; Ternary oxide; dielectric breakdown}, year = {2024}, eissn = {1879-2715}, orcid-numbers = {Kolonits, Tamás/0000-0002-5836-4398; Czigány, Zsolt/0000-0001-6410-8801; Balázsi, Katalin/0000-0002-8929-9672} } @article{MTMT:33543533, title = {Formation of LiNbO3 Nanocrystals Using the Solvothermal Method}, url = {https://m2.mtmt.hu/api/publication/33543533}, author = {Dravecz, Gabriella and Kolonits, Tamás and Péter, László}, doi = {10.3390/cryst13010077}, journal-iso = {CRYSTALS}, journal = {CRYSTALS}, volume = {13}, unique-id = {33543533}, abstract = {The optimization of the parameters of the solvothermal synthesis of lithium niobate (LiNbO3, LN) nanocrystals from Nb2O5 and LiOH was performed. The effects of polyol media, reaction time and Li excess of the starting reagents were investigated. According to the X-ray diffraction phase analysis, Li3NbO4 and Nb2O5 were also detected besides the LN phase in many samples depending on the ratio of the starting components and the reaction time. The best yield and the most homogeneous LN phase was prepared by using diethylene glycol medium with a Li/Nb ratio of 1.5 and a 72 h reaction time. The size and the shape of the LN particles were characterized by scanning electron microscopy. The particle size distribution was narrow and under 100 nm for all cases.}, keywords = {electron microscopy; LINBO3; Nanocrystal; Solvothermal Method; X-ray method}, year = {2023}, eissn = {2073-4352}, orcid-numbers = {Kolonits, Tamás/0000-0002-5836-4398; Péter, László/0000-0001-5604-0982} } @article{MTMT:34126054, title = {Reactive Sputter Deposition of Ga2O3 Thin Films Using Liquid Ga Target}, url = {https://m2.mtmt.hu/api/publication/34126054}, author = {Gajdics, Marcell and Serényi, Miklós and Kolonits, Tamás and Sulyok, Attila and Horváth, Zsolt Endre and Pécz, Béla}, doi = {10.3390/coatings13091550}, journal-iso = {COATINGS}, journal = {COATINGS}, volume = {13}, unique-id = {34126054}, issn = {2079-6412}, abstract = {Ga2O3 is a promising material in the optoelectronics and semiconductor industry. In this work, gallium oxide thin films were deposited via radio frequency (RF) sputtering, using a liquid Ga target. The reactive sputtering was carried out using different oxygen flow rates and DC target potentials induced via the RF power. The thickness of the samples varied between 160 nm and 460 nm, depending on the preparation conditions. The composition and the refractive index of the layers were investigated via energy-dispersive spectroscopy, X-ray photoelectron spectroscopy, and spectroscopic ellipsometry, respectively. It was found that, through the use of a lower DC target potential, a better film quality and higher oxygen content can be achieved. The reactive sputtering was modeled based on the Berg model, with the aim of determining the sputtering yields and the sticking coefficient. It was shown that an increase in DC target potential leads to the preferential sputtering of gallium.}, keywords = {Reactive sputtering; thin film; gallium oxide; liquid gallium}, year = {2023}, eissn = {2079-6412}, orcid-numbers = {Gajdics, Marcell/0000-0002-1891-7381; Serényi, Miklós/0000-0003-4684-3452; Kolonits, Tamás/0000-0002-5836-4398; Horváth, Zsolt Endre/0000-0002-4632-0136; Pécz, Béla/0000-0002-4651-6972} } @inproceedings{MTMT:33751711, title = {Detailing the problem of the analytical solution for the reflectivity of a double-layer coating deposited from different refractive indexes films}, url = {https://m2.mtmt.hu/api/publication/33751711}, author = {Kolonits, Tamás and Serényi, Miklós}, booktitle = {Symposium on Materials Science 2022}, unique-id = {33751711}, year = {2023}, pages = {22-31}, orcid-numbers = {Kolonits, Tamás/0000-0002-5836-4398; Serényi, Miklós/0000-0003-4684-3452} } @article{MTMT:33090439, title = {Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions}, url = {https://m2.mtmt.hu/api/publication/33090439}, author = {Hegedüs, Nikolett and Balázsi, Csaba and Kolonits, Tamás and Olasz, Dániel and Sáfrán, György and Serényi, Miklós and Balázsi, Katalin}, doi = {10.3390/ma15186313}, journal-iso = {MATERIALS}, journal = {MATERIALS}, volume = {15}, unique-id = {33090439}, abstract = {In a single process run, an amorphous silicon oxynitride layer was grown, which includes the entire transition from oxide to nitride. The variation of the optical properties and the thickness of the layer was characterized by Spectroscopic Ellipsometry (SE) measurements, while the elemental composition was investigated by Energy Dispersive Spectroscopy (EDS). It was revealed that the refractive index of the layer at 632.8 nm is tunable in the 1.48–1.89 range by varying the oxygen partial pressure in the chamber. From the data of the composition of the layer, the typical physical parameters of the process were determined by applying the Berg model valid for reactive sputtering. In our modelling, a new approach was introduced, where the metallic Si target sputtered with a uniform nitrogen and variable oxygen gas flow was considered as an oxygen gas-sputtered SiN target. The layer growth method used in the present work and the revealed correlations between sputtering parameters, layer composition and refractive index, enable both the achievement of the desired optical properties of silicon oxynitride layers and the production of thin films with gradient refractive index for technology applications.}, year = {2022}, eissn = {1996-1944}, orcid-numbers = {Balázsi, Csaba/0000-0003-4219-8783; Kolonits, Tamás/0000-0002-5836-4398; Olasz, Dániel/0000-0003-4136-4612; Sáfrán, György/0000-0003-3708-3551; Serényi, Miklós/0000-0003-4684-3452; Balázsi, Katalin/0000-0002-8929-9672} } @article{MTMT:32778844, title = {Lithium oxide loss of lithium niobate nanocrystals during high-energy ball-milling}, url = {https://m2.mtmt.hu/api/publication/32778844}, author = {Kocsor, Laura and Kovács, László and Bencs, László and Kolonits, Tamás and Lengyel, Krisztián and Bazsó, Gábor and Kis, Zsolt and Péter, László}, doi = {10.1016/j.jallcom.2022.164713}, journal-iso = {J ALLOY COMPD}, journal = {JOURNAL OF ALLOYS AND COMPOUNDS}, volume = {909}, unique-id = {32778844}, issn = {0925-8388}, year = {2022}, eissn = {1873-4669}, orcid-numbers = {Kocsor, Laura/0000-0001-8388-4531; Kovács, László/0000-0001-6388-0496; Bencs, László/0000-0003-1775-5170; Kolonits, Tamás/0000-0002-5836-4398; Péter, László/0000-0001-5604-0982} } @{MTMT:33342411, title = {Ciszteintartalmú elektrolitból leválasztott nikkel rétegek mikroszerkezete, keménysége és termikus stabilitása. Microstructure, hardness and thermal stability of nickel films electrodeposited from cysteine containing bath}, url = {https://m2.mtmt.hu/api/publication/33342411}, author = {Kolonits, Tamás and Gubicza, Jenő and Péter, László and Bakonyi, Imre and Czigány, Zsolt}, booktitle = {A Magyar Mikroszkópos Társaság 2022 Konferenciájának Kivonatkönyve}, unique-id = {33342411}, year = {2022}, pages = {130-132}, orcid-numbers = {Kolonits, Tamás/0000-0002-5836-4398; Gubicza, Jenő/0000-0002-8938-7293; Péter, László/0000-0001-5604-0982; Bakonyi, Imre/0000-0002-5873-8601; Czigány, Zsolt/0000-0001-6410-8801} } @article{MTMT:32772699, title = {Effect of laser heating on microstructure and deposition properties of cold sprayed SS304L}, url = {https://m2.mtmt.hu/api/publication/32772699}, author = {Roper, Christopher M. and Heczel, Anita and Bhattiprolu, Venkata Satish and Kolonits, Tamás and Gubicza, Jenő and Brewer, Luke N.}, doi = {10.1016/j.mtla.2022.101372}, journal-iso = {MATERIALIA}, journal = {MATERIALIA}, volume = {22}, unique-id = {32772699}, year = {2022}, eissn = {2589-1529}, orcid-numbers = {Roper, Christopher M./0000-0001-8709-1248; Heczel, Anita/0000-0001-6752-9230; Kolonits, Tamás/0000-0002-5836-4398; Gubicza, Jenő/0000-0002-8938-7293} } @mastersthesis{MTMT:32637585, title = {Elektrokémiai úton leválasztott nikkel nanoszerkezetek kialakítása és jellemzése}, url = {https://m2.mtmt.hu/api/publication/32637585}, author = {Kolonits, Tamás}, publisher = {Eötvös Loránd Tudományegyetem}, unique-id = {32637585}, year = {2021}, orcid-numbers = {Kolonits, Tamás/0000-0002-5836-4398} } @article{MTMT:31318665, title = {Different Evolutions of the Microstructure, Texture, and Mechanical Performance During Tension and Compression of 316L Stainless Steel}, url = {https://m2.mtmt.hu/api/publication/31318665}, author = {El-Tahawy, Moustafa and Jenei, Péter and Kolonits, Tamás and Han, Gigap and Park, Hyeji and Choe, Heeman and Gubicza, Jenő}, doi = {10.1007/s11661-020-05782-5}, journal-iso = {METALL MATER TRANS A}, journal = {METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE}, volume = {51}, unique-id = {31318665}, issn = {1073-5623}, year = {2020}, eissn = {1543-1940}, pages = {3447-3460}, orcid-numbers = {Jenei, Péter/0000-0001-5187-9893; Kolonits, Tamás/0000-0002-5836-4398; Gubicza, Jenő/0000-0002-8938-7293} }