TY - JOUR AU - Barna B., Péter AU - Biro, D. AU - Hasaneen, M.F. AU - Székely, Lajos AU - Menyhárd, Miklós AU - Sulyok, Attila AU - Horváth, Zsolt Endre AU - Pekker, Péter AU - Dódony, István AU - Radnóczi, György TI - Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films JF - THIN SOLID FILMS J2 - THIN SOLID FILMS VL - 688 PY - 2019 PG - 6 SN - 0040-6090 DO - 10.1016/j.tsf.2019.137478 UR - https://m2.mtmt.hu/api/publication/30774797 ID - 30774797 LA - English DB - MTMT ER - TY - JOUR AU - Biró, Domokos AU - Jakab-Farkas, László AU - Kelemen, Andras AU - Papp, Sandor AU - Hasaneen, Mohamed Fathy AU - Menyhárd, Miklós AU - Gurbán, Sándor AU - Barna B., Péter TI - Effect of Oxygen Doping on the Structure of TiN Surface Coatings JF - Proceedings of the International Conference on Recent Achievements in Mechatronics, Automation, Computer Sciences and Robotics J2 - MACRO VL - 2015 PY - 2015 IS - 1 SP - 315 EP - 324 PG - 10 SN - 2247-0948 DO - 10.1515/macro-2015-0031 UR - https://m2.mtmt.hu/api/publication/30615421 ID - 30615421 AB - In the present work the influence of the level of oxygen doping on the structure of TiN films was investigated by dedicated experiments. The films were deposited at 400 degrees C in an all metal UHV device by unbalanced magnetron sputtering at the same Ar and nitrogen flow rates, but the oxygen flow rate was changed in the experiments, incorporating oxygen in the range of 4 and 20 at.%. The structure of the films was investigated by XRD, Auger electron (AES) and X-ray photon electron (XPS) spectroscopy and transmission electron microscopy (TEM). The results discovered the crystal face anisotropy in the incorporation-segregation of oxygen leading to the change of the < 111 > texture to < 002 >. The structure analysis revealed that the < 002 > texture is developing also by competitive growth of crystals, which is the result of the limitation of the growth of the < 111 > oriented crystals by the TiO2 layer developing on their growth surface by the segregated oxygen species. The oxygen incorporating in the crystal lattice on the 002 crystal faces of the < 002 > oriented crystals is segregated by surface spinodal decomposition, developing nm sized 3D TiO2 inclusion both in the bulk of the columns and the column boundaries. LA - English DB - MTMT ER - TY - CHAP AU - Barna B., Péter AU - Radnóczi, György ED - K, Barmak ED - K, Coffey TI - Structure formation during deposition of polycrystalline metallic thin films T2 - Metallic Films for Electronic, Optical and Magnetic Applications: Structure, Processing and Properties PB - Elsevier CY - Cambridge SN - 9780857090577 PY - 2014 SP - 67 EP - 120 PG - 54 DO - 10.1533/9780857096296.1.67 UR - https://m2.mtmt.hu/api/publication/2758228 ID - 2758228 AB - The self-organized structure evolution of elemental and multicomponent/multiphase polycrystalline metallic thin films is discussed and summarized in a synthesized view. Structure evolution is considered in its entirety and discussed in frames of the pathway of fundamental phenomena of structure formation (nucleation, crystal growth and grain growth) which are related to atomic processes. it is shown that in the case of functional, generally multicomponent films, the key issues are the understanding of the very complex atomic processes, the nucleation and separation of phases as well as their interdependent, competitive growth. The derived temperature (TSZM) and composition (CoSZM) structure zone models describe the interdependent development of the phases, the grain size and shape, the texture and surface morphology. © 2014 Woodhead Publishing Limited. All rights reserved. LA - English DB - MTMT ER - TY - JOUR AU - Biró, Domokos AU - Hasaneen, MP AU - Székely, Lajos AU - Menyhárd, Miklós AU - Gurbán, Sándor AU - Pekker, Péter AU - Dódony, István AU - Barna B., Péter TI - Texture change of TiN films due to anisotropic incorporation of oxygen JF - VACUUM J2 - VACUUM VL - 103 PY - 2014 SP - 78 EP - 86 PG - 9 SN - 0042-207X DO - 10.1016/j.vacuum.2013.12.013 UR - https://m2.mtmt.hu/api/publication/2557236 ID - 2557236 AB - Results of comprehensive structural and microchemical analyses revealed the mechanisms responsible for changing the < 111 > to < 001 > competitive growth texture of TiN films when the level of oxygen doping was 20 at.%. It has been shown that the growth competition is related to the different way of segregation-incorporation of the oxygen species on the {001} and {111} crystal faces. Oxygen is preferentially segregated on the OM crystal face and is growing in the form of a 2D TiO2 surface layer on the growth surface, limiting the growth of < 111 > oriented crystals. On the {001} faces, however, the major part of condensing oxygen species is dissolved into the crystal lattice and only a part forms TiO2 aggregates. These aggregates have a 3D morphology which do not hinder the growth of < 001 > oriented crystals. Consequently, the < 001 > oriented crystals win the growth competition leading to a film structure constituted of V-shaped columns. (C) 2014 Elsevier Ltd. All rights reserved. LA - English DB - MTMT ER - TY - GEN AU - Radnóczi, György AU - Misják, Fanni AU - Biro, D AU - Barna B., Péter ED - Dr. Martin, Matzelle TI - Revealing Phase separation mechanisms in alloy thin films, the impact of electron microscopy. Impact of electron microscopy TS - Impact of electron microscopy PY - 2014 SP - 46 EP - 49 PG - 3 UR - https://m2.mtmt.hu/api/publication/2808330 ID - 2808330 LA - English DB - MTMT ER - TY - JOUR AU - Székely, Lajos AU - Sáfrán, György AU - Kovácsné Kis, Viktória AU - Horváth, Zsolt Endre AU - Mayrhofer, P H AU - Moser, M AU - Radnóczi, György AU - Misják, Fanni AU - Barna B., Péter TI - Crossover of texture and morphology in (Ti1 − xAlx)1 − yYyN alloy films and the pathway of structure evolution JF - SURFACE AND COATINGS TECHNOLOGY J2 - SURF COAT TECH VL - 257 PY - 2014 SP - 3 EP - 14 PG - 12 SN - 0257-8972 DO - 10.1016/j.surfcoat.2014.08.071 UR - https://m2.mtmt.hu/api/publication/2733632 ID - 2733632 LA - English DB - MTMT ER - TY - JOUR AU - Csanády Andrásné Bodoky, Ágnes AU - Barna B., Péter AU - Pintérné Csordás, Anna TI - Magyar részvétel a kvázikristályokkal kapcsolatos kutatásokban a 80-as és 90-es években. Csanády Andrásné, Barna Péter és Pintérné Csordás Tóth Anna beszélgetése egykori munkájukról TS - Csanády Andrásné, Barna Péter és Pintérné Csordás Tóth Anna beszélgetése egykori munkájukról JF - ANYAGOK VILÁGA J2 - ANYAGOK VILÁGA VL - 11 PY - 2013 IS - 1 SP - 1 EP - 35 PG - 35 SN - 1586-0140 UR - https://m2.mtmt.hu/api/publication/23271678 ID - 23271678 LA - Hungarian DB - MTMT ER - TY - CONF AU - Radnóczi, György AU - Misják, Fanni AU - Biró, Domokos AU - Barna B., Péter ED - Reinhard, Rachel TI - The impact of electron microscopy on revealing phase separation mechanisms in alloy thin films. T2 - MC 2013 PB - Universitätsverlag Regensburg C1 - Regensburg PY - 2013 SP - 363 EP - 364 PG - 2 UR - https://m2.mtmt.hu/api/publication/2491942 ID - 2491942 LA - English DB - MTMT ER - TY - JOUR AU - Baji, Zsófia AU - Lábadi, Zoltán AU - Horváth, Zsolt Endre AU - Molnár, György AU - Volk, János AU - Bársony, István AU - Barna B., Péter TI - Nucleation and Growth Modes of ALD ZnO JF - CRYSTAL GROWTH & DESIGN J2 - CRYST GROWTH DES VL - 12 PY - 2012 IS - 11 SP - 5615 EP - 5620 PG - 6 SN - 1528-7483 DO - 10.1021/cg301129v UR - https://m2.mtmt.hu/api/publication/2123462 ID - 2123462 LA - English DB - MTMT ER - TY - JOUR AU - Hasaneen, MF AU - Biró, Domokos AU - Székely, L AU - Nemes Incze, Péter AU - Barna B., Péter TI - Substructure in the columnar crystals of the Ti0.45O0.20N0.35 oxynitride thin film JF - VACUUM J2 - VACUUM VL - 86 PY - 2012 IS - 12 SP - 2105 EP - 2108 PG - 4 SN - 0042-207X DO - 10.1016/j.vacuum.2012.05.034 UR - https://m2.mtmt.hu/api/publication/2151424 ID - 2151424 AB - In situ oxygen doping modifies both the morphology and texture of the TiN films. It has been found that beyond 15 at% oxygen doping the columnar morphology is preserved however the <111> texture is changed to the <002>. The detailed structure analysis of the Ti0.45O0.20N0.35 oxynitride films prepared by reactive unbalanced magnetron sputtering (UBMS) in an argon/nitrogen/oxygen mixture atmosphere discovered a substructure in the bulk of the TiN(O) single crystal columns. In the cross sectional transmission electron microscopy (X-TEM) images the substructure is showing up in form of fibre-like morphology parallel to the axis of the columnar crystals and in a honeycomb-like supernetwork in the cross section of the single crystal columns in the plane view TEM specimens. The fibre-like substructure proceeds to the film surface and manifests itself in the morphology of the dome-shaped surface areas of the single crystal columns as revealed by atomic force microscopy analysis LA - English DB - MTMT ER -