@article{MTMT:30774797, title = {Cross sectional complex structure analysis is a key issue of thin film research: A case study on the preferential orientation crossover in TiN thin films}, url = {https://m2.mtmt.hu/api/publication/30774797}, author = {Barna B., Péter and Biro, D. and Hasaneen, M.F. and Székely, Lajos and Menyhárd, Miklós and Sulyok, Attila and Horváth, Zsolt Endre and Pekker, Péter and Dódony, István and Radnóczi, György}, doi = {10.1016/j.tsf.2019.137478}, journal-iso = {THIN SOLID FILMS}, journal = {THIN SOLID FILMS}, volume = {688}, unique-id = {30774797}, issn = {0040-6090}, year = {2019}, eissn = {1879-2731}, orcid-numbers = {Barna B., Péter/0000-0002-2662-7659; Menyhárd, Miklós/0000-0003-4581-5337; Horváth, Zsolt Endre/0000-0002-4632-0136; Pekker, Péter/0000-0002-0463-0742; Radnóczi, György/0000-0002-5056-7625} } @article{MTMT:30615421, title = {Effect of Oxygen Doping on the Structure of TiN Surface Coatings}, url = {https://m2.mtmt.hu/api/publication/30615421}, author = {Biró, Domokos and Jakab-Farkas, László and Kelemen, Andras and Papp, Sandor and Hasaneen, Mohamed Fathy and Menyhárd, Miklós and Gurbán, Sándor and Barna B., Péter}, doi = {10.1515/macro-2015-0031}, journal-iso = {MACRO}, journal = {Proceedings of the International Conference on Recent Achievements in Mechatronics, Automation, Computer Sciences and Robotics}, volume = {2015}, unique-id = {30615421}, abstract = {In the present work the influence of the level of oxygen doping on the structure of TiN films was investigated by dedicated experiments. The films were deposited at 400 degrees C in an all metal UHV device by unbalanced magnetron sputtering at the same Ar and nitrogen flow rates, but the oxygen flow rate was changed in the experiments, incorporating oxygen in the range of 4 and 20 at.%. The structure of the films was investigated by XRD, Auger electron (AES) and X-ray photon electron (XPS) spectroscopy and transmission electron microscopy (TEM). The results discovered the crystal face anisotropy in the incorporation-segregation of oxygen leading to the change of the < 111 > texture to < 002 >. The structure analysis revealed that the < 002 > texture is developing also by competitive growth of crystals, which is the result of the limitation of the growth of the < 111 > oriented crystals by the TiO2 layer developing on their growth surface by the segregated oxygen species. The oxygen incorporating in the crystal lattice on the 002 crystal faces of the < 002 > oriented crystals is segregated by surface spinodal decomposition, developing nm sized 3D TiO2 inclusion both in the bulk of the columns and the column boundaries.}, year = {2015}, eissn = {2247-0948}, pages = {315-324}, orcid-numbers = {Jakab-Farkas, László/0000-0001-9420-5709; Menyhárd, Miklós/0000-0003-4581-5337; Barna B., Péter/0000-0002-2662-7659} } @{MTMT:2758228, title = {Structure formation during deposition of polycrystalline metallic thin films}, url = {https://m2.mtmt.hu/api/publication/2758228}, author = {Barna B., Péter and Radnóczi, György}, booktitle = {Metallic Films for Electronic, Optical and Magnetic Applications: Structure, Processing and Properties}, doi = {10.1533/9780857096296.1.67}, unique-id = {2758228}, abstract = {The self-organized structure evolution of elemental and multicomponent/multiphase polycrystalline metallic thin films is discussed and summarized in a synthesized view. Structure evolution is considered in its entirety and discussed in frames of the pathway of fundamental phenomena of structure formation (nucleation, crystal growth and grain growth) which are related to atomic processes. it is shown that in the case of functional, generally multicomponent films, the key issues are the understanding of the very complex atomic processes, the nucleation and separation of phases as well as their interdependent, competitive growth. The derived temperature (TSZM) and composition (CoSZM) structure zone models describe the interdependent development of the phases, the grain size and shape, the texture and surface morphology. © 2014 Woodhead Publishing Limited. All rights reserved.}, keywords = {SELF-ORGANIZATION; Structure evolution; Synthesized view; Structure zone models; Polycrystalline films; Fundamental phenomena}, year = {2014}, pages = {67-120}, orcid-numbers = {Barna B., Péter/0000-0002-2662-7659; Radnóczi, György/0000-0002-5056-7625} } @article{MTMT:2557236, title = {Texture change of TiN films due to anisotropic incorporation of oxygen}, url = {https://m2.mtmt.hu/api/publication/2557236}, author = {Biró, Domokos and Hasaneen, MP and Székely, Lajos and Menyhárd, Miklós and Gurbán, Sándor and Pekker, Péter and Dódony, István and Barna B., Péter}, doi = {10.1016/j.vacuum.2013.12.013}, journal-iso = {VACUUM}, journal = {VACUUM}, volume = {103}, unique-id = {2557236}, issn = {0042-207X}, abstract = {Results of comprehensive structural and microchemical analyses revealed the mechanisms responsible for changing the < 111 > to < 001 > competitive growth texture of TiN films when the level of oxygen doping was 20 at.%. It has been shown that the growth competition is related to the different way of segregation-incorporation of the oxygen species on the {001} and {111} crystal faces. Oxygen is preferentially segregated on the OM crystal face and is growing in the form of a 2D TiO2 surface layer on the growth surface, limiting the growth of < 111 > oriented crystals. On the {001} faces, however, the major part of condensing oxygen species is dissolved into the crystal lattice and only a part forms TiO2 aggregates. These aggregates have a 3D morphology which do not hinder the growth of < 001 > oriented crystals. Consequently, the < 001 > oriented crystals win the growth competition leading to a film structure constituted of V-shaped columns. (C) 2014 Elsevier Ltd. All rights reserved.}, keywords = {FILM GROWTH; transmission electron microscopy; crystal structure; Anisotropy; AGGLOMERATION; Dissolved oxygen; Oxygen Doping; Semiconductor doping; Two dimensional; Aggregates; Metallic films; Film structure; Textures; Titanium nitride; TEXTURE EVOLUTION; Texture evolutions; Competitive growth of crystals; Titanium-nitride films; Oriented crystals; Microchemical analysis; Growth surfaces; Growth competition; Competitive growth; Anisotropic segregation of oxygen; titanium dioxide}, year = {2014}, eissn = {1879-2715}, pages = {78-86}, orcid-numbers = {Menyhárd, Miklós/0000-0003-4581-5337; Pekker, Péter/0000-0002-0463-0742; Barna B., Péter/0000-0002-2662-7659} } @misc{MTMT:2808330, title = {Revealing Phase separation mechanisms in alloy thin films, the impact of electron microscopy. Impact of electron microscopy}, url = {https://m2.mtmt.hu/api/publication/2808330}, author = {Radnóczi, György and Misják, Fanni and Biro, D and Barna B., Péter}, editor = {Dr. Martin, Matzelle}, unique-id = {2808330}, year = {2014}, pages = {46-49}, orcid-numbers = {Radnóczi, György/0000-0002-5056-7625; Barna B., Péter/0000-0002-2662-7659} } @article{MTMT:2733632, title = {Crossover of texture and morphology in (Ti1 − xAlx)1 − yYyN alloy films and the pathway of structure evolution}, url = {https://m2.mtmt.hu/api/publication/2733632}, author = {Székely, Lajos and Sáfrán, György and Kovácsné Kis, Viktória and Horváth, Zsolt Endre and Mayrhofer, P H and Moser, M and Radnóczi, György and Misják, Fanni and Barna B., Péter}, doi = {10.1016/j.surfcoat.2014.08.071}, journal-iso = {SURF COAT TECH}, journal = {SURFACE AND COATINGS TECHNOLOGY}, volume = {257}, unique-id = {2733632}, issn = {0257-8972}, year = {2014}, eissn = {1879-3347}, pages = {3-14}, orcid-numbers = {Sáfrán, György/0000-0003-3708-3551; Horváth, Zsolt Endre/0000-0002-4632-0136; Radnóczi, György/0000-0002-5056-7625; Barna B., Péter/0000-0002-2662-7659} } @article{MTMT:23271678, title = {Magyar részvétel a kvázikristályokkal kapcsolatos kutatásokban a 80-as és 90-es években. Csanády Andrásné, Barna Péter és Pintérné Csordás Tóth Anna beszélgetése egykori munkájukról}, url = {https://m2.mtmt.hu/api/publication/23271678}, author = {Csanády Andrásné Bodoky, Ágnes and Barna B., Péter and Pintérné Csordás, Anna}, journal-iso = {ANYAGOK VILÁGA}, journal = {ANYAGOK VILÁGA}, volume = {11}, unique-id = {23271678}, issn = {1586-0140}, year = {2013}, pages = {1-35}, orcid-numbers = {Barna B., Péter/0000-0002-2662-7659} } @CONFERENCE{MTMT:2491942, title = {The impact of electron microscopy on revealing phase separation mechanisms in alloy thin films.}, url = {https://m2.mtmt.hu/api/publication/2491942}, author = {Radnóczi, György and Misják, Fanni and Biró, Domokos and Barna B., Péter}, booktitle = {MC 2013}, unique-id = {2491942}, year = {2013}, pages = {363-364}, orcid-numbers = {Radnóczi, György/0000-0002-5056-7625; Barna B., Péter/0000-0002-2662-7659} } @article{MTMT:2123462, title = {Nucleation and Growth Modes of ALD ZnO}, url = {https://m2.mtmt.hu/api/publication/2123462}, author = {Baji, Zsófia and Lábadi, Zoltán and Horváth, Zsolt Endre and Molnár, György and Volk, János and Bársony, István and Barna B., Péter}, doi = {10.1021/cg301129v}, journal-iso = {CRYST GROWTH DES}, journal = {CRYSTAL GROWTH & DESIGN}, volume = {12}, unique-id = {2123462}, issn = {1528-7483}, year = {2012}, eissn = {1528-7505}, pages = {5615-5620}, orcid-numbers = {Baji, Zsófia/0000-0001-5051-3128; Horváth, Zsolt Endre/0000-0002-4632-0136; Molnár, György/0000-0002-4792-5516; Volk, János/0000-0003-3633-6190; Bársony, István/0000-0002-3469-9468; Barna B., Péter/0000-0002-2662-7659} } @article{MTMT:2151424, title = {Substructure in the columnar crystals of the Ti0.45O0.20N0.35 oxynitride thin film}, url = {https://m2.mtmt.hu/api/publication/2151424}, author = {Hasaneen, MF and Biró, Domokos and Székely, L and Nemes Incze, Péter and Barna B., Péter}, doi = {10.1016/j.vacuum.2012.05.034}, journal-iso = {VACUUM}, journal = {VACUUM}, volume = {86}, unique-id = {2151424}, issn = {0042-207X}, abstract = {In situ oxygen doping modifies both the morphology and texture of the TiN films. It has been found that beyond 15 at% oxygen doping the columnar morphology is preserved however the <111> texture is changed to the <002>. The detailed structure analysis of the Ti0.45O0.20N0.35 oxynitride films prepared by reactive unbalanced magnetron sputtering (UBMS) in an argon/nitrogen/oxygen mixture atmosphere discovered a substructure in the bulk of the TiN(O) single crystal columns. In the cross sectional transmission electron microscopy (X-TEM) images the substructure is showing up in form of fibre-like morphology parallel to the axis of the columnar crystals and in a honeycomb-like supernetwork in the cross section of the single crystal columns in the plane view TEM specimens. The fibre-like substructure proceeds to the film surface and manifests itself in the morphology of the dome-shaped surface areas of the single crystal columns as revealed by atomic force microscopy analysis}, year = {2012}, eissn = {1879-2715}, pages = {2105-2108}, orcid-numbers = {Nemes Incze, Péter/0000-0002-1222-3020; Barna B., Péter/0000-0002-2662-7659} }