https://m2.mtmt.hu/ eng 2026-05-01 14:28 JournalArticle 36377817 VALIDATED true 0 false 2026-03-24T17:49:08.481+0000 2026-03-24T17:46:53.775+0000 2025-10-13T14:07:18.895+0000 true 10014559 Bolgár Andrea /api/admin/10014559 Admin Andrea Bolgár (MFA admin 4) true 10014559 2026-03-24T09:06:37.633+0000 2026-03-24T09:06:37.633+0000 2026-03-24T17:46:53.972+0000 true 10014559 Bolgár Andrea /api/admin/10014559 Admin Andrea Bolgár (MFA admin 4) true 10014559 true false true 24 24 /api/publicationtype/24 PublicationType Journal Article 1 true 24 JournalArticle true 10000059 Article true 24 24 /api/publicationtype/24 PublicationType Journal Article 1 true 24 JournalArticle /api/subtype/10000059 Szakcikk SubType Article (Journal Article) 101 true 10000059 true 1 /api/category/1 Category Scientific true 1 Szomor, Zsombor true true /api/journal/10001371 REVIEWED SENSORS 1424-8220 true false 10001371 false 10001371 true 1424-8220 Journal FOREIGN 25 19 6113 6113 14 2025 A compact electrochemical sensor module for pH detection was developed for potential integration into specialized devices used for live cell or tissue incubation, for applications in highly parallelized cell culture analysis, by incorporating Organ-on-Chip devices. This research focuses on the deposition, structural and chemical analysis, and functional characterization of different titanium-oxide layers with various compositions as potentially sensitive materials for pH sensing applications. The titanium-oxide layers were deposited using vacuum sputtering and atomic layer deposition at 100 °C and 300 °C, respectively. Transmission electron microscopy and X-ray photoelectron spectroscopy were utilized to determine the specific composition and structure of different titanium-oxide layers. These TiOx-functionalized electrodes were connected to the application-specific analog front-end chip of the low-power readout circuit for precise evaluation. The pH sensitivity of the differently modified electrodes, employing various TiOx materials, was evaluated using pH calibration solutions ranging from pH 6 to 8. Among the various deposition solutions, such as sputtering or high-temperature atomic layer deposition, the TiOx layer deposited using low-temperature atomic layer deposition proved more suitable for pH sensing applications, with a sensitivity of 54.8–56.7 mV/pH, which closely approximates the Nernstian response. true 2025 true true true false true false GOLD 2026-03-24 true https://doi.org/10.3390/s25196113 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 Q1 false false false false 2025-10-12T14:08:45.998+0000 Anyagtudományok és Technológiák Doktori Iskola (ÓE); Mikrorendszerek Laboratórium (HUN-REN EK / MFA); Műszaki Fizikai és Anyagtudományi Intézet (HUN-REN EK); Nanoérzékelők Laboratórium (HUN-REN EK / MFA); Vékonyrétegfizika Laboratórium (HUN-REN EK / MFA) 11 37 5 11 0 true Language 10002 /api/language/10002 English Angol English true 2 true PersonAuthorship 128104710 /api/authorship/128104710 Szomor, Zsombor ✉ [Szomor, Zsombor (mikrorendszerek), author] Institute of Technical Physics and Materials Sc...; Mikrorendszerek Laboratórium (MFA); Doctoral School of Materials Science and Techno... (ÓU) 1 0.091 true false true Author 10086858 /api/author/10086858 Zsombor Szomor (mikrorendszerek) Szomor Zsombor true true Szomor Zsombor true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104711 /api/authorship/128104711 Bató, Lilia [Bató, Lilia (MEMS, BioMEMS, Mi...), author] Mikrorendszerek Laboratórium (MFA); Doctoral School of Materials Science and Techno... (ÓU) 2 0.091 false false false Author 10086876 /api/author/10086876 Lilia Bató (MEMS, BioMEMS, Mikrofluidika) Bató Lilia true true Bató Lilia true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104712 /api/authorship/128104712 Hakkel, Orsolya [Hakkel, Orsolya (mikrotechnológia,...), author] Mikrorendszerek Laboratórium (MFA) 3 0.09090909 false false false Author 10014605 /api/author/10014605 Orsolya Hakkel (mikrotechnológia, felületkémia, felületspektroszkópia) Hakkel Orsolya true 10014605 true Hakkel Orsolya true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104713 /api/authorship/128104713 Dücső, Csaba [Dücső, Csaba (MEMS), author] Mikrorendszerek Laboratórium (MFA) 4 0.09090909 false false false Author 10017633 /api/author/10017633 Csaba Dücső (MEMS) Dücső Csaba true 10017633 true Dücső Csaba true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104714 /api/authorship/128104714 Baji, Zsófia [Baji, Zsófia (Anyagtudomány), author] Nanoérzékelők Laboratórium (MFA) 5 0.09090909 false false false Author 10026837 /api/author/10026837 Zsófia Baji (Anyagtudomány) Baji Zsófia true 10026837 true Baji Zsófia true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104715 /api/authorship/128104715 Sulyok, Attila [Sulyok, Attila (Felület fizika), author] Vékonyrétegfizika Laboratórium (MFA) 6 0.09090909 false false false Author 10002024 /api/author/10002024 Attila Sulyok (Felület fizika) Sulyok Attila true 10002024 true Sulyok Attila true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104716 /api/authorship/128104716 Dodony, Erzsébet [Dodony, Erzsébet (anyagtudomány), author] Vékonyrétegfizika Laboratórium (MFA) 7 0.09090909 false false false Author 10050003 /api/author/10050003 Erzsébet Dodony (anyagtudomány) Dodony Erzsébet true 10050003 true Dodony Erzsébet true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104717 /api/authorship/128104717 Balázsi, Katalin [Balázsi, Katalin (mfa), author] Vékonyrétegfizika Laboratórium (MFA) 8 0.09090909 false false false Author 10002069 /api/author/10002069 Katalin Balázsi (mfa) Balázsi Katalin true 10002069 true Balázsi Katalin true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104718 /api/authorship/128104718 Bozorádi, János M. [Bozorádi, János Márk (Mikrorendszerek, ...), author] Nanoérzékelők Laboratórium (MFA); Doctoral School of Materials Science and Techno... (ÓU) 9 0.091 false false false Author 10086870 /api/author/10086870 János Márk Bozorádi (Mikrorendszerek, bioMEMS) Bozorádi János Márk true true Bozorádi János M. true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104719 /api/authorship/128104719 Szabó, Zoltán [Szabó, Zoltán (szilárdtestfizika), author] Mikrorendszerek Laboratórium (MFA) 10 0.09090909 false false false Author 10040215 /api/author/10040215 Zoltán Szabó (szilárdtestfizika) Szabó Zoltán true 10040215 true Szabó Zoltán true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PersonAuthorship 128104720 /api/authorship/128104720 Fürjes, Péter [Fürjes, Péter (Mikrorendszerek, ...), author] Mikrorendszerek Laboratórium (MFA) 11 0.091 false true false Author 10001783 /api/author/10001783 Péter Fürjes (Mikrorendszerek, BioMEMS, mikrofluidika, nanofluidika) Fürjes Péter true 10001783 true Fürjes Péter true false false AuthorshipType 1 /api/authorshiptype/1 Author 0 true 0 true false true PublicationIdentifier 29991389 /api/publicationidentifier/29991389 DOI: 10.3390/s25196113 PlainSource 6 /api/publicationsource/6 DOI PublicationSourceType 10001 /api/publicationsourcetype/10001 DOI true true true DOI DOI https://doi.org/@@@ true true 6 true GOLD true IDENTICAL 10.3390/s25196113 https://doi.org/10.3390/s25196113 false true PublicationIdentifier 29991442 /api/publicationidentifier/29991442 REAL: 226378 SwordSource 36 /api/publicationsource/36 REAL PublicationSourceType 10007 /api/publicationsourcetype/10007 Repozitórium true true true REAL REAL http://real.mtak.hu/@@@ true true 36 true GOLD true IDENTICAL 226378 http://real.mtak.hu/226378 false true PublicationIdentifier 30256031 /api/publicationidentifier/30256031 WoS: 001593902300001 PlainSource 1 /api/publicationsource/1 WoS PublicationSourceType 10003 /api/publicationsourcetype/10003 Indexelő adatbázis false true true WoS WoS https://www.webofscience.com/wos/woscc/full-record/@@@ true true 1 true IDENTICAL 001593902300001 https://www.webofscience.com/wos/woscc/full-record/001593902300001 false true PublicationIdentifier 30256017 /api/publicationidentifier/30256017 Scopus: 105018921212 PlainSource 3 /api/publicationsource/3 Scopus PublicationSourceType 10003 /api/publicationsourcetype/10003 Indexelő adatbázis false true true Scopus Scopus http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-@@@ true true 3 true IDENTICAL 105018921212 http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-105018921212 false true PublicationIdentifier 31138966 /api/publicationidentifier/31138966 PubMed: 41094948 PlainSource 17 /api/publicationsource/17 PubMed PublicationSourceType 10003 /api/publicationsourcetype/10003 Indexelő adatbázis false true true PubMed PubMed http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?cmd=Retrieve&db=PubMed&list_uids=@@@&dopt=Abstract true true 17 true IDENTICAL 41094948 http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?cmd=Retrieve&db=PubMed&list_uids=41094948&dopt=Abstract false true PublicationIdentifier 30874817 /api/publicationidentifier/30874817 Google scholar: 15605758071317028446 PlainSource 12 /api/publicationsource/12 Google scholar PublicationSourceType 10003 /api/publicationsourcetype/10003 Indexelő adatbázis false true true Google scholar http://scholar.Google.com/scholar?hl=en&lr=&cluster=@@@ true true 12 true IDENTICAL 15605758071317028446 http://scholar.Google.com/scholar?hl=en&lr=&cluster=15605758071317028446 false true Classification 11423 /api/classification/11423 Materials Processes true true SjrRating 11554038 /api/sjrrating/11554038 sjr:Q1 (2025) Scopus - Analytical Chemistry SENSORS 1424-8220 37 0.24 journal RatingType 10002 /api/ratingtype/10002 sjr sjr true true ClassificationExternal 1602 /api/classificationexternal/1602 Scopus - Analytical Chemistry true 1602 true Q1 FROM_LAST_YEAR true true Reference 68936775 /api/reference/68936775 1. 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(2025) SENSORS 1424-8220 25 19<div class="JournalArticle Publication long-list"> <div class="authors"> <img title="Forrásközlemény" style="float: left" src="/frontend/resources/grid/publication-core-icon.png"> <img title="Idézőközlemény" style="float: left" src="/frontend/resources/grid/publication-citation-icon.png"> <div class="autype autype0"> <span class="author-name" mtid="10086858"><a href="/gui2/?type=authors&mode=browse&sel=10086858" target="_blank">Szomor Zsombor ✉ (<span class="authorship-author-name">Szomor Zsombor</span> <span class="authorAux-mtmt"> mikrorendszerek</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/Institute of Technical Physics and Materials Science; <span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium; <span title="Óbuda University">ÓU</span>/Doctoral School of Materials Science and Technology</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10086876"><a href="/gui2/?type=authors&mode=browse&sel=10086876" target="_blank">Bató Lilia (<span class="authorship-author-name">Bató Lilia</span> <span class="authorAux-mtmt"> MEMS, BioMEMS, Mikrofluidika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium; <span title="Óbuda University">ÓU</span>/Doctoral School of Materials Science and Technology</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10014605"><a href="/gui2/?type=authors&mode=browse&sel=10014605" target="_blank">Hakkel Orsolya (<span class="authorship-author-name">Hakkel Orsolya</span> <span class="authorAux-mtmt"> mikrotechnológia, felületkémia, felületspektros...</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10017633"><a href="/gui2/?type=authors&mode=browse&sel=10017633" target="_blank">Dücső Csaba (<span class="authorship-author-name">Dücső Csaba</span> <span class="authorAux-mtmt"> MEMS</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10026837"><a href="/gui2/?type=authors&mode=browse&sel=10026837" target="_blank">Baji Zsófia (<span class="authorship-author-name">Baji Zsófia</span> <span class="authorAux-mtmt"> Anyagtudomány</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Nanoérzékelők Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10002024"><a href="/gui2/?type=authors&mode=browse&sel=10002024" target="_blank">Sulyok Attila (<span class="authorship-author-name">Sulyok Attila</span> <span class="authorAux-mtmt"> Felület fizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Vékonyrétegfizika Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10050003"><a href="/gui2/?type=authors&mode=browse&sel=10050003" target="_blank">Dodony Erzsébet (<span class="authorship-author-name">Dodony Erzsébet</span> <span class="authorAux-mtmt"> anyagtudomány</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Vékonyrétegfizika Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10002069"><a href="/gui2/?type=authors&mode=browse&sel=10002069" target="_blank">Balázsi Katalin (<span class="authorship-author-name">Balázsi Katalin</span> <span class="authorAux-mtmt"> mfa</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Vékonyrétegfizika Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10086870"><a href="/gui2/?type=authors&mode=browse&sel=10086870" target="_blank">Bozorádi János M. (<span class="authorship-author-name">Bozorádi János Márk</span> <span class="authorAux-mtmt"> Mikrorendszerek, bioMEMS</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Nanoérzékelők Laboratórium; <span title="Óbuda University">ÓU</span>/Doctoral School of Materials Science and Technology</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10040215"><a href="/gui2/?type=authors&mode=browse&sel=10040215" target="_blank">Szabó Zoltán (<span class="authorship-author-name">Szabó Zoltán</span> <span class="authorAux-mtmt"> szilárdtestfizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10001783"><a href="/gui2/?type=authors&mode=browse&sel=10001783" target="_blank">Fürjes Péter (<span class="authorship-author-name">Fürjes Péter</span> <span class="authorAux-mtmt"> Mikrorendszerek, BioMEMS, mikrofluidika, nanofl...</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium</span> </div> </div> <div class="title"><a href="/gui2/?mode=browse&params=publication;36377817" target="_blank">Characterisation of Titanium-Oxide Thin Films for Efficient pH Sensing in Low-Power Electrochemical Systems</a></div> <div> <span class="journal-title">SENSORS</span> <span class="journal-issn">( <a target="_blank" href="https://portal.issn.org/resource/ISSN/1424-8220">1424-8220</a>)</span>: <span class="journal-volume">25</span> <span class="journal-issue">19</span> <span class="page"> Paper 6113. 14 p. </span> <span class="year">(2025)</span> </div> <div class="pub-footer"> <span class="language" xmlns="http://www.w3.org/1999/html">Language: English | </span> <span class="identifiers"> <span class="id identifier oa_GOLD" title=" Gold "> <a style="color:blue" title="10.3390/s25196113" target="_blank" href="https://doi.org/10.3390/s25196113"> DOI </a> </span> <span class="id identifier oa_GOLD" title=" Gold "> <a style="color:blue" title="226378" target="_blank" href="http://real.mtak.hu/226378"> REAL </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="001593902300001" target="_blank" href="https://www.webofscience.com/wos/woscc/full-record/001593902300001"> WoS </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="105018921212" target="_blank" href="http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-105018921212"> Scopus </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="41094948" target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?cmd=Retrieve&db=PubMed&list_uids=41094948&dopt=Abstract"> PubMed </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="15605758071317028446" target="_blank" href="http://scholar.Google.com/scholar?hl=en&lr=&cluster=15605758071317028446"> Google scholar </a> </span> </span> <OnlyViewableByAuthor><div class="ratings"> <div class="journal-subject">Journal subject: Scopus - Analytical Chemistry&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q1</div> <div class="journal-subject">Journal subject: Scopus - Electrical and Electronic Engineering&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q1</div> <div class="journal-subject">Journal subject: Scopus - Instrumentation&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q1</div> <div class="journal-subject">Journal subject: Scopus - Atomic and Molecular Physics, and Optics&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> <div class="journal-subject">Journal subject: Scopus - Biochemistry&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> <div class="journal-subject">Journal subject: Scopus - Information Systems&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> <div class="journal-subject">Journal subject: Scopus - Medicine (miscellaneous)&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> </div></OnlyViewableByAuthor> <div class="publication-citation"> <a target="_blank" href="/api/publication?cond=citations.related;eq;36377817&sort=publishedYear,desc&sort=title"> Number of cited publications: 1 </a> </div> <div class="mtid"><span class="long-pub-mtid">Publication: 36377817</span> | <span class="status-data status-VALIDATED"> Validated </span> Core Citing | <span class="type-subtype">Journal Article ( Article ) </span> | <span class="pub-category">Scientific</span> | <span class="publication-sourceOfData">RIS-Egyéb</span> </div> <div class="lastModified">Last Modified: 2026.03.24. 18:46 Andrea Bolgár (MFA admin 4) </div> </div></div>