https://m2.mtmt.hu/ eng 2026-05-02 12:57 JournalArticle 35751036 VALIDATED true 0 false 2026-01-07T11:46:35.121+0000 2026-01-07T11:35:03.636+0000 2025-02-10T18:03:53.213+0000 true 10026837 Baji Zsófia /api/author/10026837 Author true 10026837 2026-01-07T02:51:43.269+0000 2026-01-07T11:35:03.643+0000 true 10014559 Bolgár Andrea /api/admin/10014559 Admin true 10014559 true false true 24 24 /api/publicationtype/24 PublicationType 1 true 24 JournalArticle true 10000059 Article true 24 24 /api/publicationtype/24 PublicationType 1 true 24 JournalArticle /api/subtype/10000059 Szakcikk SubType 101 true 10000059 true 1 /api/category/1 Category true 1 Baji, Zsófia Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition true true /api/journal/2929 REVIEWED true false 2929 false 2929 true 0734-2101 1520-8559 Journal FOREIGN 43 2 022405 022405 15 2025 The present paper reports on the atomic layer deposition of vanadium sulfide (VS) layers from tetrakis(ethylmethylamino)vanadium and H2S. The deposition of VS layers with these precursors has proven possible between 200 and 300 °C. The prepared layers were amorphous, but a postdeposition annealing in H2S atmosphere yielded crystalline VS layers. 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MFA); Műszaki Fizikai és Anyagtudományi Intézet (HUN-REN EK); Nanoszerkezetek Laboratórium (HUN-REN EK / MFA); Nanoérzékelők Laboratórium (HUN-REN EK / MFA); Vékonyrétegfizika Laboratórium (HUN-REN EK / MFA) 5 23 5 5 0 true Language 10002 /api/language/10002 Angol English true 2 true PersonAuthorship 123232263 /api/authorship/123232263 1 0.2 true false false Author 10026837 /api/author/10026837 Baji Zsófia true 10026837 true Baji Zsófia true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false true PersonAuthorship 123232264 /api/authorship/123232264 2 0.2 false false false Author 10026942 /api/author/10026942 Fogarassy Zsolt true 10026942 true Fogarassy Zsolt true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false true PersonAuthorship 123232265 /api/authorship/123232265 3 0.2 false false false Author 10002024 /api/author/10002024 Sulyok Attila true 10002024 true Sulyok Attila true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true 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10.1002/anie.201803092 false true Reference 63272535 /api/reference/63272535 19 10.1063/1.3384349 false true Reference 63272536 /api/reference/63272536 20 10.1021/acs.chemmater.0c02505 false true /api/publication/35751036 <div class="JournalArticle Publication long-list"> <div class="authors"> <img title="Forrásközlemény" style="float: left" src="/frontend/resources/grid/publication-core-icon.png"> <div class="autype autype0"> <span class="author-name" mtid="10026837"><a href="/gui2/?type=authors&mode=browse&sel=10026837" target="_blank">Baji Zsófia (<span class="authorship-author-name">Baji Zsófia</span> <span class="authorAux-mtmt"> Anyagtudomány</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/Institute of Technical Physics and Materials Science; <span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Nanoérzékelők Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10026942"><a href="/gui2/?type=authors&mode=browse&sel=10026942" target="_blank">Fogarassy Zsolt (<span class="authorship-author-name">Fogarassy Zsolt</span> <span class="authorAux-mtmt"> Anyagfizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Vékonyrétegfizika Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10002024"><a href="/gui2/?type=authors&mode=browse&sel=10002024" target="_blank">Sulyok Attila (<span class="authorship-author-name">Sulyok Attila</span> <span class="authorAux-mtmt"> Felület fizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Vékonyrétegfizika Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10001480"><a href="/gui2/?type=authors&mode=browse&sel=10001480" target="_blank">Horváth Zsolt Endre (<span class="authorship-author-name">Horváth Zsolt Endre</span> <span class="authorAux-mtmt"> Szilárdtestfizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Nanoszerkezetek Laboratórium</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10040215"><a href="/gui2/?type=authors&mode=browse&sel=10040215" target="_blank">Szabó Zoltán (<span class="authorship-author-name">Szabó Zoltán</span> <span class="authorAux-mtmt"> szilárdtestfizika</span>) </a> </span> <span class="author-affil"><span title="HUN-REN Centre for Energy Research">HUN-REN CER</span>/<span title="Institute of Technical Physics and Materials Science">MFA</span>/Mikrorendszerek Laboratórium</span> </div> </div> <div class="title"><a href="/gui2/?mode=browse&params=publication;35751036" target="_blank">Novel precursor for the preparation of vanadium sulfide layers with atomic layer deposition</a></div> <div> <span class="journal-title">JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A-VACUUM SURFACES AND FILMS</span> <span class="journal-issn">(<a target="_blank" href="https://portal.issn.org/resource/ISSN/0734-2101">0734-2101</a> <a target="_blank" href="https://portal.issn.org/resource/ISSN/1520-8559">1520-8559</a>)</span>: <span class="journal-volume">43</span> <span class="journal-issue">2</span> <span class="page"> Paper 022405. 15 p. </span> <span class="year">(2025)</span> </div> <div class="pub-footer"> <span class="language" xmlns="http://www.w3.org/1999/html">Language: English | </span> <span class="identifiers"> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="10.1116/6.0004127" target="_blank" href="https://doi.org/10.1116/6.0004127"> DOI </a> </span> <span class="id identifier oa_RESTRICTED" title=" Restricted "> <a style="color:blue" title="215861" target="_blank" href="http://real.mtak.hu/215861"> REAL </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="001418763500002" target="_blank" href="https://www.webofscience.com/wos/woscc/full-record/001418763500002"> WoS </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="85217559266" target="_blank" href="http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85217559266"> Scopus </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="1737744912038026868" target="_blank" href="http://scholar.Google.com/scholar?hl=en&lr=&cluster=1737744912038026868"> Google scholar </a> </span> </span> <OnlyViewableByAuthor><div class="ratings"> <div class="journal-subject">Journal subject: Scopus - Condensed Matter Physics&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> <div class="journal-subject">Journal subject: Scopus - Surfaces, Coatings and Films&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q2</div> <div class="journal-subject">Journal subject: Scopus - Surfaces and Interfaces&nbsp;&nbsp;&nbsp;Rank:&nbsp;Q3</div> </div></OnlyViewableByAuthor> <div class="publication-citation" style="margin-left: 0.5cm;"> <span title="" class="citingPub-count">Citing papers: 1</span> | Independent citation: 0 | Self citation: 1 | Unknown citation: 0 | Number of citations in WoS: 1 | Number of citations in Scopus:&nbsp;1 | WoS/Scopus assigned:&nbsp;1 | Number of citations with DOI:&nbsp;1 </div> <div class="mtid"><span class="long-pub-mtid">Publication: 35751036</span> | <span class="status-data status-VALIDATED"> Validated </span> Core | <span class="type-subtype">Journal Article ( Article ) </span> | <span class="pub-category">Scientific</span> | <span class="publication-sourceOfData">kézi felvitel</span> </div> <div class="lastModified">Last Modified: 2026.01.07. 12:35 Andrea Bolgár (MFA admin 4) </div> </div></div>