mtmtThe Hungarian Scientific Bibliography

XML JSON Public search Magyarul

Optical Microlithography XVII

Smith, Bruce W. [ed.]

English Scientific

Published: International Society for Optics and Photonics, Bellingham (WA), United States of America 2004

Conference: Microlithography 2004 2004-02-22 [Santa Clara, Cuba]

Series: Proceedings of SPIE 0277-786X 1996-756X, 5377

Identifiers

MTMT: 33150449

Chapters

Allan Douglas C. et al. Induced density changes in 193-nm excimer-laser-damaged silica glass: a kinetic model. (2004) In: Optical Microlithography XVII p. 827
Moll Johannes et al. Advances in the use of birefringence to measure laser-induced density changes in fused silica. (2004) In: Optical Microlithography XVII p. 1721

Citation styles: IEEE ACM APA Chicago Harvard CSLCopyPrint

2025-04-17 00:02

×

Export list as bibliography

Citation styles: IEEE ACM APA Chicago HarvardPrintCopy