Optical components are the main parts in laser systems and also the limiting factor
for high power laser. All-silica based optical components proved to have extremely
high laser induced damage threshold and were already tested on standard glass substrates.
Such coatings are fabricated by employing glancing angle deposition method, combination
of nanostructured porous low refractive index and dense high refractive index thin
films were fabricated. Anti-reflection coatings and mirrors with required reflection
were achieved, which have superior LIDT values (50.7 J/cm(2)). Anti-reflection coating
was deposited directly on BBO crystal and results are demonstrated. In this work,
the possibility to improve microlaser systems with all-silica coatings is presented.
