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Ni thin film of several hundreds of nanometer thickness, which is deposited on fused silica substrate, was irradiated by single pulse of KrF excimer laser (wavelength: 248nm, pulse width: 30ns) or femtosecond pulsed laser (wavelength: 800nm, pulse width: 120fs), and transferred to a Si acceptor substrate. It is shown that laser beam profile affected the removal of thin film. It is revealed that adhesion of particles was inhibited using femtosecond pulsed laser in comparison with the case of excimer LIFT process.", "keywords" : [ { "otype" : "Keyword", "mtid" : 2055, "link" : "/api/keyword/2055", "label" : "NICKEL", "published" : true, "oldId" : 2055, "snippet" : true }, { "otype" : "Keyword", "mtid" : 3602, "link" : "/api/keyword/3602", "label" : "SILICON", "published" : true, "oldId" : 3602, "snippet" : true }, { "otype" : "Keyword", "mtid" : 7367, "link" : "/api/keyword/7367", "label" : "thin films", "published" : true, "oldId" : 7367, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1003038, "link" : "/api/keyword/1003038", "label" : "Substrates", "published" : true, "oldId" : 1003038, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1012293, "link" : "/api/keyword/1012293", "label" : "Laser pulses", "published" : true, "oldId" : 1012293, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1018284, "link" : "/api/keyword/1018284", "label" : "Laser applications", "published" : true, "oldId" : 1018284, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1054374, "link" : "/api/keyword/1054374", "label" : "Fused silica", "published" : true, "oldId" : 1054374, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1098272, "link" : "/api/keyword/1098272", "label" : "Excimer lasers", "published" : true, "oldId" : 1098272, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1146776, "link" : "/api/keyword/1146776", "label" : "Direct writing", "published" : true, "oldId" : 1146776, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1146776, "link" : "/api/keyword/1146776", "label" : "Direct writing", "published" : true, "oldId" : 1146776, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1201922, "link" : "/api/keyword/1201922", "label" : "Laser induced forward transfer", "published" : true, "oldId" : 1201922, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1807337, "link" : "/api/keyword/1807337", "label" : "Metal thin film", "published" : true, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1834529, "link" : "/api/keyword/1834529", "label" : "Laser-induced forward transfer (LIFT)", "published" : true, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1867386, "link" : "/api/keyword/1867386", "label" : "femtosecond pulsed laser", "published" : true, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1975401, "link" : "/api/keyword/1975401", "label" : "Thin film patterning", "published" : true, "snippet" : true }, { "otype" : "Keyword", "mtid" : 1975401, "link" : "/api/keyword/1975401", "label" : "Thin film patterning", "published" : true, "snippet" : true }, { "otype" : "Keyword", "mtid" : 2771404, "link" : "/api/keyword/2771404", "label" : "adhesion", "published" : true, "snippet" : true } ], "digital" : null, "printed" : null, "sourceYear" : 2020, "foreignEdition" : true, "foreignLanguage" : true, "fullPublication" : true, "conferencePublication" : true, "nationalOrigin" : null, "missingAuthor" : false, "oaType" : "NONE", "oaCheckDate" : "2023-03-03", "oaFree" : false, "citationCount" : 0, "citationCountUnpublished" : 0, "citationCountWoOther" : 0, "independentCitCountWoOther" : 0, "doiCitationCount" : 0, "wosCitationCount" : 0, "scopusCitationCount" : 0, "independentCitationCount" : 0, "unhandledCitationCount" : 0, "citingPubCount" : 0, "independentCitingPubCount" : 0, "unhandledCitingPubCount" : 0, "citedPubCount" : 7, "citedCount" : 7, "referenceList" : "Pique, A., Chrisey, D., (2002) Direct-Write Technologies for Rapid Prototyping Applications, , Academic press ;\n Bohandy, J., Kim, B., Adrian, F., Metal deposition from a supported metal film using an excimer laser (1986) J. 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