LASER-BASED MICRO- AND NANOPROCESSING XIII

Kling, R [ed.]; Watanabe, A [ed.]; Klotzbach, U [ed.]

English Scientific

Published: International Society for Optics and Photonics (SPIE), Bellingham (WA), United States of America 2019

Series: Proceedings of SPIE - The International Society for Optical Engineering 1996-756X

Identifiers

MTMT: 30987773

Chapters

Lorenz P. et al. Laser-induced large area sub-mu m and nanostructuring of dielectric surfaces and thin metal layer. (2019) In: LASER-BASED MICRO- AND NANOPROCESSING XIII

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2025-04-11 00:06