Nanotransfer printing (nTP) technology can generate highly functional three-dimensional
(3D) nano structures in a low-cost and high-throughput fashion. Nevertheless, the
fabrication yield and quality of the transferred nanostructures are often limited
by the merging of the surface patterns of replica stamps during transfer printing.
Here, an nTP technology was developed to fabricate large-area and crack-free 3D multilayer
nanostructures. Instead of directly depositing materials on the patterned flexible
stamp in conventional nTPs, we transferred the nanostructures straightforwardly onto
an attached polydimethylsiloxane slab by removing a sacrificial water-soluble poly(acrylic
acid) film, which can avoid the cracking of metal film and the failures of printing
nanostructures 500 rim onto target substrates. Based on this approach, subwavelength-thick
polarization rotators working at infrared wavelengths were fabricated. Excellent performance
of linear polarization rotation over a broadband was realized. This nTP approach could
complement existing fabrication techniques and benefit the development of various
functional nanostructures with complex multilayer hierarchies.