ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES IV

Resnick, DJ [ed.]; Tong, WM [ed.]

English Scientific

Published: International Society for Optics and Photonics (SPIE), Bellingham (WA), United States of America 2012

Series: Proceedings of SPIE 0277-786X 1996-756X

Identifiers

MTMT: 30582343

Chapters

Doerk Gregory et al. Measurement of Placement Error Between Self-Assembled Polymer Patterns and Guiding Chemical Prepatterns. (2012) In: ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES IV

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2025-04-16 23:15