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MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. - SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE

English Scientific

Published: 2008

Conference: MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. - SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE 2008-01-21 [San José, Costa Rica]

Series: Proceedings of SPIE 0277-786X 1996-756X, 6885

Identifiers

MTMT: 30147830

Chapters

Pal S et al. Reduced order thermal Modeling of a one-dimensional electrothermally actuated micromirror device. (2008) In: MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. - SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE
Pal S et al. Reduced order thermal Modeling of a one-dimensional electrothermally actuated micromirror device - art. no. 68850B. (2008) In: MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. - SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE

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2025-04-11 08:06

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