Micromachining and Microfabrication Process Technology XIV

Perez-Maher, Mary Ann [ed.]; Chiao, Jung-Chih [ed.]; Resnick, Paul J [ed.]

English Conference proceedings (Book) Scientific
Published: International Society for Optics and Photonics, Bellingham (WA), United States of America 2009
Conference: Conference on Micromachining and Microfabrication Process Technology XIV 2009-01-27 [San Jose (CA), United States of America]
Series: Proceedings of SPIE 0277-786X 1996-756X, 7204
    Identifiers
    Subjects:
    • ENGINEERING AND TECHNOLOGY
    Citation styles: IEEEACMAPAChicagoHarvardCSLCopyPrint
    2025-04-25 12:15