Characterization of SiO2/SiNx gate insulators for graphene based nanoelectromechanical systems

Endre, Tóvári [Tóvári, Endre (fizika), author] Department of Physics (BUTE / FNS / IP); Miklós, Csontos [Csontos, Miklós (Kísérleti szilárd...), author] HAS-BME Condensed Materials Research Group (BUTE / FNS / IP / DP); Department of Physics (BUTE / FNS / IP); Tamás, Kriváchy; Péter, Fürjes [Fürjes, Péter (Mikrorendszerek, ...), author] Institute of Technical Physics and Materials Sc... (MTA TTK); Szabolcs, Csonka [Csonka, Szabolcs (Kísérleti szilárd...), author] HAS-BME Condensed Materials Research Group (BUTE / FNS / IP / DP); Department of Physics (BUTE / FNS / IP)