In this work, a finite element analysis is used to simulate electrostatically actuated
comb drives operating under DC conditions (zero actuating frequency). A dynamic multiphysics
model is developed using the arbitrary Lagrangian-Eulerian (ALE) formulation.
The results show the coupled interaction between the electrostatic and mechanical
domains of the transducer. The analysis is based on the evolution of electrostatic
force versus comb finger engagement.
With the help of numerical simulations, an optimum design was found for a comb drive
reliability test structure with a well-defined part exposed to fatigue.