https://m2.mtmt.hu/ hun 2026-04-17 03:28 JournalArticle 1122362 VALIDATED true 0 2017-01-08T09:01:03.000+0000 false 1122362 2026-01-19T06:04:44.620+0000 2025-02-17T14:03:00.689+0000 2008-05-15T22:00:00.000+0000 true 1313679 Bársony István /api/author/1313679 Author true 1313679 2025-01-18T15:45:18.405+0000 2025-01-18T15:45:18.405+0000 2025-02-17T14:03:00.865+0000 true 10014559 Bolgár Andrea /api/admin/10014559 Admin true 10014559 true false true 24 24 /api/publicationtype/24 PublicationType 1 true 24 JournalArticle true 10000059 Article true 24 24 /api/publicationtype/24 PublicationType 1 true 24 JournalArticle /api/subtype/10000059 Szakcikk SubType 101 true 10000059 true 1 /api/category/1 Category true 1 Adam, M CMOS integrated tactile sensor array by porous Si bulk micromachining true true /api/journal/1313573 REVIEWED true false 1313573 false 1313573 true 0924-4247 1873-3069 Journal FOREIGN 142 1 192 195 192 4 2008 2008 true true true false true false NONE 2026-01-19 false true 10014559 Bolgár Andrea /api/admin/10014559 Admin true 10014559 44 0 37 34 4 39 33 27 34 36 34 34 32 40 4 0 44 40 37 34 0 4 4 Folyóiratcikk Journal Article 24 27 Könyvrészlet Chapter in Book 25 8 Könyv Book 23 1 Egyéb konferenciaközlemény Conference paper 31 1 Egyéb konferenciakötet Conference proceedings 32 0 Oltalmi formák Protection forms 26 0 Disszertáció Thesis 28 6 Egyéb Miscellaneous 29 1 Alkotás Achievement 22 0 Kutatási adat Research data 33 0 Folyóiratcikk Journal Article 24 0 0 0 Könyvrészlet Chapter in Book 25 0 0 0 Könyv Book 23 0 0 0 Egyéb konferenciaközlemény Conference paper 31 0 0 0 Egyéb konferenciakötet Conference proceedings 32 0 0 0 Oltalmi formák Protection forms 26 0 0 0 Disszertáció Thesis 28 0 0 0 Egyéb Miscellaneous 29 0 0 0 Alkotás Achievement 22 0 0 0 Kutatási adat Research data 33 0 0 0 2007 0 2 1 2 1 2008 0 3 1 3 1 2009 0 1 1 1 1 2010 0 2 2 2 2 2011 0 4 4 4 4 2012 0 4 4 4 4 2013 0 1 1 1 1 2014 0 5 5 5 5 2015 0 1 1 1 1 2016 0 5 5 5 5 2017 0 2 2 2 2 2018 0 3 3 3 3 2019 0 1 1 1 1 2020 0 2 2 2 2 2021 0 3 3 3 3 2022 0 3 3 3 3 2023 0 2 1 2 1 Q1 false 10017633 false false false 2013-08-21T08:26:49.000+0000 2013-02-23T19:18:00.000+0000 MTA KFKI Műszaki Fizikai és Anyagtudományi Kuta... 5 26 1 6 0 true Language 10002 /api/language/10002 Angol English true 2 true PersonAuthorship 577427 /api/authorship/577427 1 0.16666667 true false Author 10017598 /api/author/10017598 Ádám Antalné true 10017598 true Adam M true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438811 true PersonAuthorship 577428 /api/authorship/577428 2 0.16666667 false false Author 10017607 /api/author/10017607 Mohácsy Tibor true 10017607 true Mohacsy T true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438810 true PersonAuthorship 577429 /api/authorship/577429 3 0.16666667 false false Jonas P true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438809 true PersonAuthorship 577430 /api/authorship/577430 4 0.16666667 false false Author 10017633 /api/author/10017633 Dücső Csaba true 10017633 true Duecso C true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438808 true PersonAuthorship 577431 /api/authorship/577431 5 0.16666667 false false Author 10017612 /api/author/10017612 Vázsonyi Éva true 10017612 true Vazsonyi E true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438807 true PersonAuthorship 577432 /api/authorship/577432 6 0.16666667 false true Author 1313679 /api/author/1313679 Bársony István true 1313679 true Barsony I true false false AuthorshipType 1 /api/authorshiptype/1 0 true 0 true false 10438806 true PublicationIdentifier 174559 /api/publicationidentifier/174559 PlainSource 6 /api/publicationsource/6 PublicationSourceType 10001 /api/publicationsourcetype/10001 true true true DOI DOI https://doi.org/@@@ true true 6 true false IDENTICAL 10.1016/j.sna.2007.08.003 https://doi.org/10.1016/j.sna.2007.08.003 false 474994 true PublicationIdentifier 174557 /api/publicationidentifier/174557 PlainSource 1 /api/publicationsource/1 PublicationSourceType 10003 /api/publicationsourcetype/10003 false true true WoS WoS https://www.webofscience.com/wos/woscc/full-record/@@@ true true 1 true false IDENTICAL 000253613100029 https://www.webofscience.com/wos/woscc/full-record/000253613100029 false 904769 true PublicationIdentifier 174558 /api/publicationidentifier/174558 PlainSource 3 /api/publicationsource/3 PublicationSourceType 10003 /api/publicationsourcetype/10003 false true true Scopus Scopus http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-@@@ true true 3 true false IDENTICAL 38849145641 http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-38849145641 false 474993 true PublicationIdentifier 21642051 /api/publicationidentifier/21642051 PlainSource 12 /api/publicationsource/12 PublicationSourceType 10003 /api/publicationsourcetype/10003 false true true Google scholar http://scholar.Google.com/scholar?hl=en&lr=&cluster=@@@ true true 12 true IDENTICAL 7731427454734386486 http://scholar.Google.com/scholar?hl=en&lr=&cluster=7731427454734386486 true true Classification 10154 /api/classification/10154 true true SjrRating 5840961 /api/sjrrating/5840961 90 0.24 journal RatingType 10002 /api/ratingtype/10002 sjr true true ClassificationExternal 2208 /api/classificationexternal/2208 true 2208 true Q1 DIRECT true 5840961 true Reference 968942 /api/reference/968942 1 false true Reference 968943 /api/reference/968943 2 false true Reference 968944 /api/reference/968944 3 false true Reference 968945 /api/reference/968945 4 false true Reference 968946 /api/reference/968946 5 10.1002/cta.364 false true Reference 968947 /api/reference/968947 6 false true Reference 968948 /api/reference/968948 7 false true Reference 968949 /api/reference/968949 8 10.1109/JSEN.2006.877990 false true Reference 968950 /api/reference/968950 9 false true /api/publication/1122362 <div class="JournalArticle Publication long-list"> <div class="authors"> <img title="Forrásközlemény" style="float: left" src="/frontend/resources/grid/publication-core-icon.png"> <img title="Idézőközlemény" style="float: left" src="/frontend/resources/grid/publication-citation-icon.png"> <div class="autype autype0"> <span class="author-name" mtid="10017598"><a href="/gui2/?type=authors&mode=browse&sel=10017598" target="_blank">Adam M (<span class="authorship-author-name">Ádám Antalné</span> <span class="authorAux-mtmt"> mfa</span>) </a> </span> <span class="author-affil">MTA KFKI Műszaki Fizikai és Anyagtudományi Kutató Intézet</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10017607"><a href="/gui2/?type=authors&mode=browse&sel=10017607" target="_blank">Mohacsy T (<span class="authorship-author-name">Mohácsy Tibor</span> <span class="authorAux-mtmt"> mfa</span>) </a> </span> <span class="author-affil">MTA KFKI Műszaki Fizikai és Anyagtudományi Kutató Intézet</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" >Jonas P </span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10017633"><a href="/gui2/?type=authors&mode=browse&sel=10017633" target="_blank">Duecso C (<span class="authorship-author-name">Dücső Csaba</span> <span class="authorAux-mtmt"> MEMS</span>) </a> </span> <span class="author-affil">MTA KFKI Műszaki Fizikai és Anyagtudományi Kutató Intézet</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="10017612"><a href="/gui2/?type=authors&mode=browse&sel=10017612" target="_blank">Vazsonyi E (<span class="authorship-author-name">Vázsonyi Éva</span> <span class="authorAux-mtmt"> mfa</span>) </a> </span> <span class="author-affil">MTA KFKI Műszaki Fizikai és Anyagtudományi Kutató Intézet</span> ;&nbsp;&nbsp;&nbsp; <span class="author-name" mtid="1313679"><a href="/gui2/?type=authors&mode=browse&sel=1313679" target="_blank">Barsony I (<span class="authorship-author-name">Bársony István</span> <span class="authorAux-mtmt"> Mikro/nanoelektronika</span>) </a> </span> <span class="author-affil">MTA KFKI Műszaki Fizikai és Anyagtudományi Kutató Intézet</span> </div> </div> <div class="title"><a href="/gui2/?mode=browse&params=publication;1122362" target="_blank">CMOS integrated tactile sensor array by porous Si bulk micromachining</a></div> <div> <span class="journal-title">SENSORS AND ACTUATORS A-PHYSICAL</span> <span class="journal-issn">(<a target="_blank" href="https://portal.issn.org/resource/ISSN/0924-4247">0924-4247</a> <a target="_blank" href="https://portal.issn.org/resource/ISSN/1873-3069">1873-3069</a>)</span>: <span class="journal-volume">142</span> <span class="journal-issue">1</span> <span class="page"> pp 192-195 </span> <span class="year">(2008)</span> </div> <div class="pub-footer"> <span class="language" xmlns="http://www.w3.org/1999/html">Nyelv: Angol | </span> <span class="identifiers"> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="10.1016/j.sna.2007.08.003" target="_blank" href="https://doi.org/10.1016/j.sna.2007.08.003"> DOI </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="000253613100029" target="_blank" href="https://www.webofscience.com/wos/woscc/full-record/000253613100029"> WoS </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="38849145641" target="_blank" href="http://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-38849145641"> Scopus </a> </span> <span class="id identifier oa_none" title="none"> <a style="color:blue" title="7731427454734386486" target="_blank" href="http://scholar.Google.com/scholar?hl=en&lr=&cluster=7731427454734386486"> Google scholar </a> </span> </span> <OnlyViewableByAuthor><div class="ratings"> <div class="journal-subject">Folyóirat szakterülete: Scopus - Electrical and Electronic Engineering&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q1</div> <div class="journal-subject">Folyóirat szakterülete: Scopus - Instrumentation&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q1</div> <div class="journal-subject">Folyóirat szakterülete: Scopus - Metals and Alloys&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q1</div> <div class="journal-subject">Folyóirat szakterülete: Scopus - Surfaces, Coatings and Films&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q1</div> <div class="journal-subject">Folyóirat szakterülete: Scopus - Condensed Matter Physics&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q2</div> <div class="journal-subject">Folyóirat szakterülete: Scopus - Electronic, Optical and Magnetic Materials&nbsp;&nbsp;&nbsp;SJR indikátor:&nbsp;Q2</div> </div></OnlyViewableByAuthor> <div class="publication-citation" style="margin-left: 0.5cm;"> <span title="Nyilvános idézőközlemények összesen, említések nélkül" class="citingPub-count">Nyilvános idéző összesen: 44</span> | Független: 40 | Függő: 4 | Nem jelölt: 0 | WoS jelölt: 27 | Scopus jelölt:&nbsp;34 | WoS/Scopus jelölt:&nbsp;36 | DOI jelölt:&nbsp;33 </div> <div class="publication-citation"> <a target="_blank" href="/api/publication?cond=citations.related;eq;1122362&sort=publishedYear,desc&sort=title"> Idézett közlemények száma: 4 </a> </div> <div class="mtid"><span class="long-pub-mtid">Közlemény: 1122362</span> | <span class="status-data status-VALIDATED"> Egyeztetett </span> <span class="oldId">Régi azonosító: 1122362</span> | Forrás Idéző | <span class="type-subtype">Folyóiratcikk ( Szakcikk ) </span> | <span class="pub-category">Tudományos</span> | <span class="publication-sourceOfData">WOS</span> </div> <div class="lastModified">Utolsó módosítás: 2025.02.17. 15:03 Bolgár Andrea (MFA admin 4) </div> </div></div>